第37卷第5期 光电工程V ol.37, No.5 2010年5月Opto-Electronic Engineering May, 2010 文章编号：1003-501X(2010)05-0091-06
近地空间下X/EUV透射光栅的
热力学有限元分析
宋曦1,2，朱效立1，韦飞3，谢常青1，谢二庆2，刘明1
( 1. 兰州大学物理学院电子材料与器件工程研究所，兰州 730000；
2. 中国科学院微电子研究所纳米加工与新器件集成技术实验室，北京 100029；
3. 中国科学院空间科学与应用研究中心，北京 100080 )
摘要：为了实现极紫外透射光栅光谱仪在近地空间的应用，针对其核心色散元件2 000 线/毫米X/EUV透射光栅，本文采用有限元方法建立了机械模型并对其热学性能和耦合特性进行计算机模拟计算，通过模拟热膨胀系数不同
的材料构成的薄膜光栅在近地空间受到太阳辐照后的温度场，得到该光栅表面的热形变分布。结果表明，在高真
空热环境下，该透射光栅表面形变量平均可达0.56 μm，而影响光栅周期的纵向形变平均值则为71.5 nm。由于热
形变会对光栅衍射效率产生重要影响并导致光谱仪精度和性能的下降，利用有限元分析模拟的结果，进一步优化
光栅的封装和设计制作，使其栅线处纵向热形变趋近于零，为2 000 线/毫米X/EUV透射光栅在太阳极紫外辐射
探测器上得到应用提供了科学依据和有效支持。
关键词：近地空间；X/EUV；透射光栅；有限元；热形变
中图分类号：TN253 文献标志码：A doi：10.3969/j.issn.1003-501X.2010.05.017 Thermodynamics Finite Element Analysis of X/EUV
Transmission Grating in Terrestrial Space
SONG Xi1,2，ZHU Xiao-li1，WEI Fei3，XIE Chang-qing1，XIE Er-qing2，LIU Ming1 ( 1. Institute of Electronic Materials, Physical Science and Technology School, Lanzhou University, Lanzhou 730000, China;
2. Key Lab of Nano-fabrication and Novel Devices Integrated Technology, Institute of Microelectronics,
Chinese Academy of Sciences, Beijing 100029, China;
3. Center For Space Science and Applied Research, Chinese Academy of Sciences, Beijing 100080, China )
Abstract: In order to meet the requirement of Extreme Ultraviolet (EUV) transmission grating spectrometer in terrestrial space, thermal and mechanical properties of 2000 l/mm X/EUV transmission grating was investigated by means of simulation method. The mechanistic model was established and its thermal and coupling properties were simulated using the method of finite element analysis. Moreover, the distributions of thermal field and thermal deformation were obtained based on transmission grating consisting of different materials with different thermal expansion coefficients. The results are shown that the surface deformation of transmission grating is 0.56 μm as well as the longitudinal deformation value is
71.5 nm (average value). Due to thermal deformation, the diffraction efficiency and precision of spectrograph decline. In
terms of simulation results, the package and structure of grating were optimized for applications in solar EUV radiation spectroscopies.
Key words:terrestrial space; X/EUV; transmission grating; finite element; thermal deformation
收稿日期：2009-12-09 ；收到修改稿日期：2010-02-04
基金项目：国家基础科学重大研究计划项目(2007CB935302)；国家重大专项资助项目(2008ZX02051-005)
作者简介：宋曦(1982-)，男(汉族)，山东泰安人。硕士研究生，主要从事光电子学应用领域的研究。E-mail: https://www.doczj.com/doc/8310794488.html,@https://www.doczj.com/doc/8310794488.html,。
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